MASTER DIE FOR MICROLENS ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a fine structure formation method improving controllability of etching in fine machining using isotropic etching, and realizing uniform machining even in a large substrate.;SOLUTION: In the fine structure formation method, an etching solution is used on a workpiece provided with a mask having a predetermined opening to carry out etching of the workpiece from the opening, and a recess is formed on a surface of the workpiece. Insoluble matter is provided by a reaction between a substance included in the workpiece and the etching solution, and etching is stopped by the insoluble matter accumulated on an exposed face of the workpiece.;COPYRIGHT: (C)2009,JPO&INPIT