ORIGINAL DATA CREATION METHOD, ORIGINAL CREATION METHOD, EXPOSURE METHOD, AND ORIGINAL DATA CREATION PROGRAM

摘要

PPROBLEM TO BE SOLVED: To provide a method for creating original data capable of improving resolution and throughput, and to provide a program and an exposure method using the original. PSOLUTION: The original data creation method has: a step for finding a two-dimensional mutual transmission coefficient based on a function expressing light intensity distribution formed on a projection optical system pupil face by illumination light and a projection optical system pupil function; a calculation step for calculating approximate aerial images approximating the aerial images in image faces of a projection optical system by at least one component of a plurality of components of the aerial images based on patterns in the two-dimensional mutual transmission coefficient and the object face of the projection optical system; and a creation step for creating the patterns adding auxiliary patterns to the patterns in the object face based on the approximate aerial images. The method repeatedly executes the calculation step and the creation step by replacing the patterns created in the creation step with the patterns in the object face, and creates the original data including the patterns created by the repeated execution. PCOPYRIGHT: (C)2009,JPO&INPIT