CANTILEVER MODULE FOR SCANNING TYPE PROBE MICROSCOPE, CANTILEVER HOLDER FOR SCANNING TYPE PROBE MICROSCOPE EQUIPPED WITH IT AND SCANNING TYPE PROBE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a cantilever module for a scanning type probe microscope which prevents the deterioration of the electric component on the side of a scanning type probe microscope main body to enhance durability when measurement is performed using a self-detection type cantilever and is easy to exchange a cantilever.;SOLUTION: The cantilever module 40 for the scanning type probe microscope is equipped with a cantilever 20 having a probe 20a at its leading end and equipped with not only a displacement detection means for detecting self-displacement but also the detection electrode terminal 25a of the displacement detection means, a cantilever holding part 40x for holding the cantilever at its leading end part 40a and having an external connection terminal 40d at its rear end part 40b through an extension part 40c, and a connection structure 40y for electrically connecting the detection electrode terminal and the external connection terminal.;COPYRIGHT: (C)2009,JPO&INPIT