PIEZOELECTRIC THIN FILM, PIEZOELECTRIC MATERIAL, FABRICATION METHOD OF PIEZOELECTRIC THIN FILM AND PIEZOELECTRIC MATERIAL, AND PIEZOELECTRIC RESONATOR, ACTUATOR ELEMENT AND PHYSICAL SENSOR USING PIEZOELECTRIC THIN FILM

摘要

PPROBLEM TO BE SOLVED: To provide a piezoelectric thin film, including an aluminum nitride thin film, which improves a piezoelectric response. PSOLUTION: A piezoelectric thin film includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 to 50 atom% on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom%. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has. PCOPYRIGHT: (C)2009,JPO&INPIT