Cleaning method and cleaning system using supercritical or subcritical fluid

摘要

PROBLEM TO BE SOLVED: To provide a cleaning system using a supercritical or subcritical fluid which shortens the working time of a cleaning operation and realizes saving man-power of the cleaning operation of a material to be cleaned and of the managing work by using cleaning information recorded in a tag fixed to the material to be cleaned.;SOLUTION: The cleaning system is provided with a cleaning tank 16 cleaning the material to be cleaned by using the supercritical or the subcritical fluid, a cleaning information processing device 28 carrying out the transmission and reception of a signal and the operation to the tag fixed to the material to be cleaned, a thermometer 21 and a pressure gauge 22 detecting the temperature and the pressure of the fluid in the cleaning tank 16, and a cleaning-device control-apparatus 26 making the fluid in the cleaning tank 16 pass through for a specified time and controlling a heater 14 and a compressor 13.;COPYRIGHT: (C)2005,JPO&NCIPI