GLASS SUBSTRATE FOR USE IN UNEXPOSED MASTER DISK FOR OPTICAL RECORDING MEDIUM, SURFACE MODIFICATION METHOD THEREFOR AND SURFACE MODIFICATION APPARATUS THEREFOR, AND SURFACE MODIFICATION SYSTEM THEREOF, AND UNEXPOSED MASTER DISK FOR THE OPTICAL RECORDING MEDIUM AND METHOD OF MANUFACTURING MASTER DISK FOR THE OPTICAL RECORDING MEDIUM

摘要

PPROBLEM TO BE SOLVED: To provide a glass substrate for use in an unexposed master disk for optical recording medium and a surface modification method therefor, or the like, capable of suppressing increase in costs, because not only adhesion between a photoresist material and a surface of the glass substrate is improved, but also a photoresist layer can be laminated on the surface of the glass substrate, using an apparatus of existing simple structure. PSOLUTION: The surface modification method for the glass substrate for use in the unexposed master disk for optical recording medium is such that the glass substrate is heated in a dry atmosphere, and an adhesive agent is provided on the surface of the glass substrate to perform surface modification. It is preferred that after the adhesive agent is provided, the glass substrate be cooled in the dry atmosphere, until the surface temperature of the glass substrate reaches a temperature at which the photoresist material can be applied on the surface of the glass substrate. PCOPYRIGHT: (C)2009,JPO&INPIT