Being manner in order coat to do the surface of the formative of the high tenacious zirconia ceramic

摘要

I to form a toughened zirconia ceramic material, the outermost surface of the corrosion resistant components of semiconductor processing equipment such as a plasma chamber. , Or made of ceramic material and overall, the components can be made by coating a ceramic material such as aluminum, aluminum alloy, stainless steel, on a substrate, such as a refractory metal. The toughened zirconia ceramic, the zirconia dispersion toughened ceramic (tetragonal zirconia particles are dispersed in Al2O3), such as tetragonal zirconia polycrystals (TZP) material, partially stabilized zirconia (PSZ), zirconia toughened alumina I include the (ZTC). When toughened zirconia ceramic coating, it is possible to make more intermediate layers or one or between the ceramic coating and components. In order to improve the adhesion of the ceramic coating, the intermediate layer surface components or surface may be performed a process of roughening the surface in front of the ceramic coating.