METHOD FOR SYNTHESIZING CARBON NANOTUBE, AND DEVICE AND SYSTEM FOR SYNTHESIZING CARBON NANOTUBE TO WHICH THE METHOD IS APPLIED

摘要

PPROBLEM TO BE SOLVED: To provide a method for synthesizing a carbon nanotube, and the like. PSOLUTION: A boat loading a substrate is prepared outside a synthetic space for synthesizing a carbon nanotube. Then, the substrate is loaded on the boat. Then, the boat on which the substrate is loaded is transported to the synthetic space. Then, a carbon nanotube is synthesized on the substrate transported to the synthetic space. Here, the boat has a multi stage structure so that it can load numbers of substrates. Thus, the step for synthesizing a carbon nanotube can be advanced efficiently. PCOPYRIGHT: (C)2009,JPO&INPIT