TUNING-FORK-TYPE BIMORPH PIEZOELECTRIC VIBRATOR, VIBRATING GYROSCOPE MODULE INCLUDING THE VIBRATOR, AND METHOD FOR MANUFACTURING THE TUNING-FORK-TYPE BIMORPH PIEZOELECTRIC VIBRATOR

摘要

A tuning-fork-type bimorph piezoelectric vibrator includes two piezoelectric bodies that are bonded together and have opposite polarization directions. An intermediate metal layer is disposed between bonding surfaces of the piezoelectric bodies. A first slit is arranged to define legs and a base of the tuning fork structure. Second slits are provided in a first principal surface having a front metal layer to define driving/detecting electrodes. The tuning-fork-type bimorph piezoelectric vibrator provides improved temperature characteristics of a detuning frequency by not including a back metal layer on a second principal surface at least in an area in which greater than a predetermined level of stress is applied during operation.