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MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS
MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS
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机译:MEMS传感器驱动装置,MEMS传感器驱动方法以及使用该MEMS的有源传感器
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摘要
A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.
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