PDV METHOD AND PDV DEVICE FOR PRODUCING LOW FRICTION, WEAR RESISTANT, FUNCTIONAL COATINGS, AND COATINGS PRODUCED THEREWITH

摘要

The invention relates to a PVD method and a PVD device for producing diamond-like (DLC) coatings with high adhesion and substrates coated according to the PVD method. The substrates which are to be coated are pretreated by means of high power impulse magnetron sputtering (HIPIMS) of tungsten carbide (WC) and subsequently provided with a transition layer of WC. Subsequently, a C-DLC or a W-DLC layer is produced by means of magnetron cathode sputtering (MS).