首页> 外国专利> ORGANIC LIGHT-EMITTING DIODE, METHOD FOR MANUFACTURING ORGANIC LIGHT-EMITTING DIODE, MANUFACTURING DEVICE FOR MANUFACTURING ORGANIC LIGHT-EMITTING DIODE, AND PLASMA PROCESSING DEVICE

ORGANIC LIGHT-EMITTING DIODE, METHOD FOR MANUFACTURING ORGANIC LIGHT-EMITTING DIODE, MANUFACTURING DEVICE FOR MANUFACTURING ORGANIC LIGHT-EMITTING DIODE, AND PLASMA PROCESSING DEVICE

机译:有机发光二极管,制造有机发光二极管的方法,用于制造有机发光二极管的制造装置以及等离子体处理装置

摘要

An organic layer is protected in the process of manufacturing an organic light-emitting diode. An organic layer (51) is continuously formed on ITO (50) on a substrate by deposition (step a in Fig. 2). A cathode layer (52) and a hydrogen-adsorbing layer (53) are formed by sputtering (step b and step c in Fig. 2), and part of the organic layer (51) is removed by etching (step d in Fig. 2). A side portion of the cathode layer (52) is formed by sputtering (step e in Fig. 2), the hydrogen-adsorbing layer (53) is formed by sputtering (step f in Fig. 2), and finally a sealing film (54) is formed by CVD (step g in Fig. 2). The hydrogen-adsorbing layer (53) adsorbs hydrogen gas used in the process of manufacturing the organic light-emitting diode. Thus, the organic layer (51) can be prevented from deteriorating.
机译:在制造有机发光二极管的过程中保护有机层。通过沉积(图2中的步骤a)在衬底上的ITO(50)上连续形成有机层(51)。通过溅射形成阴极层(52)和氢吸附层(53)(图2中的步骤b和步骤c),并且通过蚀刻去除有机层(51)的一部分(图2中的步骤d)。 2)。通过溅射形成阴极层(52)的侧部(图2中的步骤e),通过溅射形成氢吸收层(53)(图2中的步骤f),最后形成密封膜(图2)。通过CVD(图2中的步骤g)形成图54)。氢吸收层(53)吸收有机发光二极管的制造工序中使用的氢气。因此,可以防止有机层(51)劣化。

著录项

  • 公开/公告号WO2009096250A1

    专利类型

  • 公开/公告日2009-08-06

    原文格式PDF

  • 申请/专利权人 TOKYO ELECTRON LIMITED;MOYAMA KAZUKI;

    申请/专利号WO2009JP50633

  • 发明设计人 MOYAMA KAZUKI;

    申请日2009-01-19

  • 分类号H05B33/04;H01L51/50;H05B33/10;H05B33/26;

  • 国家 WO

  • 入库时间 2022-08-21 19:17:30

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