A method for manufacturing hydrogen sensors by using Pd nano wire

摘要

The method for producing hydrogen sensor is provided with a Pd nanowires. ; The present invention the step of forming the external electrode pattern onto the substrate; After applying the resin layer on the substrate, the resin layer forming a nano channel pattern; After the nano-channel using a sputtering on a substrate formed by depositing Pd, by removing the resin layer for forming the Pd nanowires process; After applying the resin layer on the Pd nanowires formed substrate, forming a pattern on a resin layer between each of the predetermined position between the outer end portions of the electrode pattern and the Pd nanowires, and both ends of the external electrode pattern with Pd nanowires process; And depositing a conductive metal on the pattern after the resin layer is formed, the resin layer pattern step of electrically connecting the Pd nanowires and the external electrode pattern by removing; a hydrogen sensor manufacturing method using the Pd nanowires, including relates.