DUAL-MODE SPECTRAL IMAGING METHOD AND SYSTEM USING ACOUSTO-OPTIC TUNABLE FILTER, AND OPTICAL APPARATUS USING THE SAME

摘要

The present invention is a dual-mode spectral imaging method using acousto-optic modulation filters, optical devices using the system and it relates to an acoustooptic modulation filter using a spectral and polarization characteristics of the spectral wave standing wave and abnormal by measuring the two diffracted light containing the different kinds of information in dual mode, the refractive index and the thickness of the semiconductor thin film or a multi-layer film including Spectroscopic imaging method using a dual-mode filter acoustooptic modulation of the refractive index and spectral properties, such as shape and the cell can be measured accurately at a high speed, to provide an optical apparatus using the system and it has the purpose. ; Dual mode using a acousto-optic modulation filter according to the present invention as a means to solve this problem, the spectroscopic imaging system to examine the light source to the spectral light generated from a light source into measurement light and reference light; Sample part to obtain the measurement light reflected by irradiating the measurement light to the specimen; Reference portion that was polarized reference beam; Acoustooptic modulation filter that is polarization states to the other two diffracted light from the spectral interference light obtained by the polarization of the reflected measurement light and reference light polarized; Each diffraction light detection section for detecting; And using the detected diffracted light signal processing and control unit for controlling the image formation process and the acousto-optic modulation filter; including characterized by comprising: In addition, the present invention provides an optical device comprising an optical member for performing a method and imaging method for imaging using such imaging systems.