首页> 外国专利> PHOTON FLUID ELEMENT AND A MANUFACTURING METHOD THEREOF FOR MANUFACTURING THREE DIMENSIONAL PHOTON CRYSTAL WITHOUT COMPLEX ARRANGEMENT

PHOTON FLUID ELEMENT AND A MANUFACTURING METHOD THEREOF FOR MANUFACTURING THREE DIMENSIONAL PHOTON CRYSTAL WITHOUT COMPLEX ARRANGEMENT

机译:光子流体元件及其制造方法,用于制造无复杂排列的三维光子晶体

摘要

PURPOSE: A photon fluid element and a manufacturing method thereof for manufacturing three dimensional photon crystal without complex arrangement are provided to reduce combination and simplify a manufacturing process.;CONSTITUTION: A photon fluid element manufacture method is as follows. A micro-fluid channel is formed by using a photolithographic method. A photon nano structure having three dimensional photon determination inside a channel includes by using a holography etching method. The holography etching method is transferred to the photo resist film in which the laser beam is by mixing a photo-initiator.;COPYRIGHT KIPO 2010
机译:目的:提供一种光子流体元件及其制造方法,用于制造三维光子晶体而无需复杂的布置,以减少组合,简化制造过程。组成:一种光子流体元件的制造方法如下。通过使用光刻方法形成微流体通道。在通道内部具有三维光子确定的光子纳米结构包括通过使用全息刻蚀方法。通过混合光引发剂将全息刻蚀方法转移到激光束所在的光刻胶膜中。; COPYRIGHT KIPO 2010

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