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PHOTON FLUID ELEMENT AND A MANUFACTURING METHOD THEREOF FOR MANUFACTURING THREE DIMENSIONAL PHOTON CRYSTAL WITHOUT COMPLEX ARRANGEMENT
PHOTON FLUID ELEMENT AND A MANUFACTURING METHOD THEREOF FOR MANUFACTURING THREE DIMENSIONAL PHOTON CRYSTAL WITHOUT COMPLEX ARRANGEMENT
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机译:光子流体元件及其制造方法,用于制造无复杂排列的三维光子晶体
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摘要
PURPOSE: A photon fluid element and a manufacturing method thereof for manufacturing three dimensional photon crystal without complex arrangement are provided to reduce combination and simplify a manufacturing process.;CONSTITUTION: A photon fluid element manufacture method is as follows. A micro-fluid channel is formed by using a photolithographic method. A photon nano structure having three dimensional photon determination inside a channel includes by using a holography etching method. The holography etching method is transferred to the photo resist film in which the laser beam is by mixing a photo-initiator.;COPYRIGHT KIPO 2010
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