ARRAY TESTER, METHOD FOR MEASURING A POINT OF SUBSTRATE OF THE SAME AND METHOD FOR MEASURING A POSITION CORDINATE

摘要

An array tester, method for measuring a point of substrate of the same and a method for measuring a position coordinate are provided to reduce a measurement time at a certain position by calculating a position coordinates of each pixel adjacent a camera. In an array tester and a method for measuring a point of substrate of the same, an array testing apparatus(10) comprises a test module(50), a loading unit(20), a test block(30), and an un-loader(40). The loading unit comprises two or more Loading plates(22), and the substrate is supported by a substrate chuck(70) and is transferred to a test block. The test block comprises a stage(32) for test and voltage supply unit(38), and the test module comprises one or more modulator head(100).