Sensor used especially for magnetic field measurement comprises a flux gate sensor consisting of an excitation coil, an induction coil and a magnetic core of alternating soft magnetic layers and antiferromagnetic layers

摘要

Sensor (1) used especially for magnetic field measurement comprises at least one flux gate sensor (2, 3) consisting of an excitation coil (7, 8), an induction coil (5, 6) and a magnetic core (9, 10) with a layer structure consisting of alternating soft magnetic layers and antiferromagnetic layers. Preferred Features: One soft magnetic layer consists of cobalt-iron, cobalt-iron-boron or nickel-iron and one antimagnetic layer of iridium-manganese. The soft magnetic layer is not more than 100, especially not more than 30 nm thick. The antiferromagnetic layer is not more than 15, especially not more than 10 nm thick. The core consists of at least ten soft magnetic layers and at least 10 antiferromagnetic layers.