Micro-electro-mechanical resonance device for generating telephony carriers, has vibrating and/or anchoring structure comprising periodic structure with zones, where zones respectively comprise different acoustic propagation properties

摘要

The device has an input electrode (EE) connected to an alternating current source, and an anchoring structure connected to a substrate. An oscillating structure i.e. disk, is connected to the anchoring structure. The vibration of the oscillating structure under the effect of the input electrode generates alternating current, when the oscillating structure (SV) is supplied with the current. The vibrating and/or anchoring structure has a periodic structure (SP) comprising zones (M1, M2) different from each other, where the zones respectively comprise different acoustic propagation properties.