Silicon micromechanical gyroscope without driving structure

摘要

A silicon micromechanical gyroscope includes a sensing element and a signal process circuit 2. The gyroscope does not have a driving structure, but is mounted on the measured rotating body and driven by the rotary force of the rotating body. The sensing element comprises a silicon frame 10, a silicon slice 11, an upper electrode ceramics plate 12 and a bottom electrode ceramics plate 13. Pairs of electrodes are provided in the electrode ceramic plates 12,13 such that four capacitors C1-C4 are formed. The capacitors form the bridge arms of a signal detecting bridge circuit. If there is a rotating movement of the rotating body, the silicon slice's position will change and the capacitance of the four capacitors will change accordingly. A signal indicative of the body's pitch and roll angular velocity is obtained. The gyroscope is simple in structure, has a reduced volume and hence effectively lower costs and saves energy.