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SOLAR CELL WHOSE STRUCTURE LAYER IS (Zn, In, Al)O BASED TRANSPARENT ELECTRODE LAYER, AND ZnO-In2O3-Al BASED SPUTTERING TARGET USED FOR FORMING THE (Zn, In, Al)O BASED TRANSPARENT ELECTRODE LAYER
SOLAR CELL WHOSE STRUCTURE LAYER IS (Zn, In, Al)O BASED TRANSPARENT ELECTRODE LAYER, AND ZnO-In2O3-Al BASED SPUTTERING TARGET USED FOR FORMING THE (Zn, In, Al)O BASED TRANSPARENT ELECTRODE LAYER
PROBLEM TO BE SOLVED: To provide a solar cell whose structure layer is a (Zn, In, Al)O based transparent electrode layer having low volume resistivity and thereby contributing to the improvement of photoelectric conversion efficiency, and a ZnO-In2O3-Al based sputtering target used for forming the (Zn, In, Al)O based transparent electrode layer.;SOLUTION: Sputtering film formation of the (Zn, In)O based transparent electrode layer configuring the solar cell is executed using a ZnO-In2O3-Al based sputtering target constituted of a sintered body of a pressurized compact having a mixed composition comprising, by mass%, 0.1-10% indium oxide, 0.1-5% metal Al:, and zinc oxide as remainder (provided that inevitable impurity content: ≤0.1%).;COPYRIGHT: (C)2011,JPO&INPIT
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机译：解决的问题：提供一种太阳能电池，该太阳能电池的结构层是具有低体积电阻率的（Zn，In，Al）O基透明电极层，从而有助于提高光电转换效率;以及ZnO-In 2 O 3 -Al基溅射靶，用于形成（Zn，In，Al）O基透明电极层。;解决方案：（Zn，In）O溅射成膜使用由具有混合成分的加压成形体的烧结体构成的ZnO-In 2 O 3 -Al基溅射靶来执行构成太阳能电池的基于透明电极层的步骤。以质量％计，包括0.1-10％的氧化铟，0.1-5％的金属Al：和剩余的氧化锌（前提是不可避免的杂质含量：＆le; 0.1％）.;版权：（C）2011，JPO＆INPIT
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