APPARATUS FOR MEASURING REFLECTION CHARACTERISTICS, CALIBRATION REFERENCE DEVICE FOR THE SAME, AND APPARATUS FOR MEASURING DEGRADATION OF CALIBRATION REFERENCE PLATE OF REFLECTION CHARACTERISTIC MEASURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a technique for detecting changes in the reflection characteristics of a calibration reference plate used for while calibration of a reflection characteristic measuring apparatus.;SOLUTION: The reflection characteristics measuring apparatus for measuring the reflection characteristics of an object to be measured by irradiating illumination light to the object to be measured includes a first illumination-light-receiving means for measuring the reflection characteristics of the object to be measured and the reflection characteristics of the calibration reference plate and a second illumination-light-receiving means for measuring the optical characteristics of the calibration reference plate.;COPYRIGHT: (C)2010,JPO&INPIT