METHOD OF EVALUATING MOLD FOR MANUFACTURING MOTH-EYE TYPE ANTI-REFLECTION FILM, METHOD OF MANUFACTURING MOLD FOR MANUFACTURING MOTH-EYE TYPE ANTI-REFLECTION FILM, METHOD OF REGENERATING MOLD FOR MANUFACTURING MOTH-EYE TYPE ANTI-REFLECTION FILM AND METHOD OF MANUFACTURING MOTH-EYE TYPE ANTI-REFLECTION FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of evaluating a mold for manufacturing a moth-eye type anti-reflection film by which a fine uneven shape formed on a mold used for manufacturing the moth-eye type anti-reflection film is precisely evaluated non-destructively.;SOLUTION: The method of evaluating the mold for manufacturing the moth-eye type anti-reflection film is provided for evaluating the mold for manufacturing the moth-eye type anti-reflection film which has a plurality of fine pores formed at the surface. In the method, the average pore depth of the fine pores is measured by measuring the positive reflection factor of the surface of the mold on which fine pores are formed.;COPYRIGHT: (C)2010,JPO&INPIT