METHOD FOR PRODUCING THIN FILM OF NANOPARTICLE, THIN FILM OF NANOPARTICLE AND ELECTRON DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a thin film of nanoparticles, which is dense, uniform in a wide range and is hard to cause a crack and exfoliation, a thin film of nanoparticles, and an electron device using the same.;SOLUTION: The method for producing the thin film of the nanoparticles includes: a step A of dispersing the nanoparticles 15 in a dispersion medium to prepare a nanoparticle dispersion liquid 11; a step B of covering the surface of an electroconductive substrate 12 with a film 14 of a macromolecule electrolyte having a reverse electric charge to the surface electric charge of the nanoparticles 15 in the dispersion liquid 11; and a step C of immersing the substrate 12 which has been covered with the film 14 of the macromolecule electrolyte and a counter electrode 13 into the dispersion liquid 11, and depositing the nanoparticles 15 on the substrate 12 which has been covered with the film 14 of the macromolecule electrolyte, with an electrophoretic deposition method. The thin film 10 of the nanoparticles produced with this method and an electron device using the same are disclosed.;COPYRIGHT: (C)2010,JPO&INPIT