ORGANIC SILICON OXIDE-BASED FINE PARTICLE AND METHOD FOR PRODUCING THE SAME, COMPOSITION FOR FORMING POROUS MEMBRANE, POROUS MEMBRANE AND METHOD FOR FORMING THE SAME, AS WELL AS SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an organic silicon oxide-based fine particles forming a porous membrane satisfying an expected dielectric constant and mechanical strength for a high performance porous insulation film and excellent in chemical stability.;SOLUTION: The organic silicon oxide-based fine particles comprise an inner core, that contains an inorganic silicon oxide or an organic silicon oxide, and an outer shell, that surrounds the inner core and contains an organic silicon oxide formed using a hydrolyzable silane compound in the presence of a basic catalyst, and the ratio T/Q is larger in the outer shell than in the inner core, wherein, the T is a number of silicon atom having at least one bond connected with carbon atom out of the silicon atoms constructing the inner core or the outer shell, and the Q is a number of silicon atom whose all four bonds are connected with oxygen atom, and the organic silicon oxide-based fine particle contains the hydrolyzable silane compound for forming the outer shell connected with silicon atom having at least two hydrolyzable groups through a carbon chain or a carbon chain containing one silicon among a part of carbons.;COPYRIGHT: (C)2010,JPO&INPIT