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THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THIN FILM TRANSISTOR, ACTIVE MATRIX TYPE THIN FILM TRANSISTOR ARRAY, AND ACTIVE MATRIX DRIVE DISPLAY DEVICE
THIN FILM TRANSISTOR, METHOD OF MANUFACTURING THIN FILM TRANSISTOR, ACTIVE MATRIX TYPE THIN FILM TRANSISTOR ARRAY, AND ACTIVE MATRIX DRIVE DISPLAY DEVICE
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机译:薄膜晶体管,薄膜晶体管的制造方法,有源矩阵型薄膜晶体管阵列以及有源矩阵驱动显示装置
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摘要
PROBLEM TO BE SOLVED: To provide an organic transistor which has a high operating frequency and whose power consumption is low and a method of manufacturing the same by improving both carrier injection efficiency and extraction efficiency for an interface between a source electrode and a semiconductor, and an interface between a drain electrode and the semiconductor, and to provide a display device with small pixel variance using the same.;SOLUTION: In a thin film transistor 1, among interfaces with which a semiconductor layer 10 is brought into contact, a first organic molecular thin film 7 is provided on an interface with a gate insulating film 4, a second organic molecular thin film 8 is provided on an interface with the source electrode 5, and a third organic molecular thin film 9 is provided on an interface with the drain electrode 6, and the thin film transistor 1 has a structure such that the respective organic molecular thin films 7-9 are made of materials different from one another. OTS is used for the first organic molecular thin film 7. Fluorinated hexadecane thiol is used for the second organic molecular thin film 8. Hexadecane thiol is used for the third organic molecular thin film 9.;COPYRIGHT: (C)2010,JPO&INPIT
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