In the manner which it controls or models the process which is elaborated with the thermal decomposition carbon control or model

摘要

One which it should elaborate or several porous backing materials (10) loading ones which are included are heated in the furnace, can insert the reactivity gas phase which at least contains the carbon precusor hydrocarbon of 1 kinds in the said furnace, the pulling out duct which is connected to the exit of the said furnace (27) through, the outflow gas pulls from the said furnace and can make a foolish mistake. Allene, outflow gas content ratio of the chemical compound of 1 where it is chosen from allylene and benzene kinds is measured at least. Hiding following to the content ratio which was measured, following ones namely flow of the reactivity gas phase which is inserted in the furnace, at least flow of one constitution component of the gas phase which is inserted in the furnace and residence time of the gas phase in the furnace, in at least adjusting one which is selected from heating temperature of the backing material and the pressure which exists in the furnace parameter depending method is controlled. At least the adjustment of one parameter is done, as maintained measurement content ratio substantially at fixed value. Hiding, elaboration process it is possible to control with model or real time.