Method of cleaning equipment and cleaning playback apparatus and method, and organic coating of organic coating cleaning solution

摘要

PROBLEM TO BE SOLVED: To provide a removing method and removing device of an organic coating which enable the regeneration of the solvency of the organic coating of a washing liquid containing ethylene carbonate as an active ingredient and uses the same for circulation as the washing liquid and is capable of regenerating the same without using ozone.;SOLUTION: A crystallization regenerator of the organic coating washing liquid which has a washing tank for receiving the washing liquid containing the ethylene carbonate as the active ingredient, a crystallization means for precipitating an ethylene carbonate crystal by cooling down the washing liquid dissolving the organic coating transferred from the washing tank, a heating means for liquefying the ethylene carbonate separated in the crystallization means by heating, a circulation means for transferring the ethylene carbonate liquefied by the heating means to the washing tank for circulation via the crystallization means and the heating means from the washing tank, and which is capable of recycling the ethylene carbonate as the washing liquid is provided.;COPYRIGHT: (C)2005,JPO&NCIPI