首页>
外国专利>
Methods to make fine patterns by exploiting difference of threshold laser fluence of materials and tft fabrication methods using the same
Methods to make fine patterns by exploiting difference of threshold laser fluence of materials and tft fabrication methods using the same
展开▼
机译:利用材料的阈值激光注量的不同来制作精细图案的方法以及使用该方法的tft制作方法
展开▼
页面导航
摘要
著录项
摘要
Disclosed are methods of making fine patterns by exploiting difference in threshold laser fluence of materials and a thin film transistor (TFT) fabrication methods using the same, and more particularly, to a method of forming a fine pattern and a method of fabricating a TFT through the same method, in which a plurality of layers different in threshold laser fluence are stacked and then exposed to a laser so that a layer having a low threshold laser fluence can be selectively removed, thereby making fine patterns precisely and forming a cavity of a gate electrode precisely and easily.
展开▼