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RESISTIVE RANDOM ACCESS MEMORY, NONVOLATILE MEMORY, AND METHOD OF MANUFACTURING RESISTIVE RANDOM ACCESS MEMORY
RESISTIVE RANDOM ACCESS MEMORY, NONVOLATILE MEMORY, AND METHOD OF MANUFACTURING RESISTIVE RANDOM ACCESS MEMORY
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机译:电阻式随机存取存储器,非易失性存储器以及制造电阻式随机存取存储器的方法
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摘要
A resistive random access memory includes a lower electrode; a metal oxide film formed on the lower electrode and having a variable resistance, the metal oxide film having a first portion containing a metal element forming the metal oxide film and a second portion richer in oxygen than the first portion; and an upper electrode formed on the metal oxide film.
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