首页>
外国专利>
FIC Installation and Method for Operating a FIC Installation in the Pressure Range Above Atmospheric Pressure
FIC Installation and Method for Operating a FIC Installation in the Pressure Range Above Atmospheric Pressure
展开▼
机译:FIC安装和在高于大气压的压力范围内操作FIC安装的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of Fluoride Ion Cleaning (FIC) of a component is provided. A FIC installation includes a reaction chamber and a reactive gas or a reactive gas mixture. A pressure of the reactive gas or the reactive gas mixture in the reaction chamber is set at least occasionally above atmospheric pressure, wherein the pressure in the reaction chamber is periodically lowered and raised.
展开▼