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Optical displacement meter, optical displacement measuring method, optical displacement measuring program, computer-readable recording medium, and device that records the program
Optical displacement meter, optical displacement measuring method, optical displacement measuring program, computer-readable recording medium, and device that records the program
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机译:光学位移计,光学位移测量方法,光学位移测量程序,计算机可读记录介质以及记录该程序的装置
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摘要
The present invention provides an optical displacement meter which performs a profile search for performing positional adjustment of a profile shape. The optical displacement meter includes: an amplifier for amplifying a reception light signal from a two-dimensional light receiving device; profile computing means capable of computing a profile shape of the object to be measured on the basis of an amplification signal obtained by the amplifier in a point in the first direction by the reflection light of the light emitted from the projector; a display unit capable of displaying the profile shape of the object to be measured computed by the profile computing means; registered-profile designating means for designating a registered profile as a reference of a profile search from profile shapes displayed on the display unit; and profile matching means for performing a profile search to find a match between an input profile shape and the registered profile designated by the registered profile designating means and, on the basis of a result of the profile search, rotating or moving the input profile shape.
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