首页>
外国专利>
Method and apparatus for producing UV laser from all-solid-state system
Method and apparatus for producing UV laser from all-solid-state system
展开▼
机译:全固态系统生产紫外激光的方法和装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
An all-solid-state laser system produces coherent DUV radiation through a third or fourth harmonic generation. The fundamental wavelength is generated by a slave laser optically pumped by one or more light source(s) of high density array(s) and is stabilized by injecting optical seeds whose wavelength is rapidly swept to cover the fundamental wavelength. The pump effects are enhanced by a pump chamber that recycles unabsorbed pump light. The present invention enables DUV pulses with a width shorter than 1 ns and a repetition rate higher than 100 kHz. The output DUV wavelength is adjustable by selecting an appropriate seeder.
展开▼