Microactuator with displacement sensing function and deformable mirror including the microactuator

摘要

According to the present invention, a moving element such as an electrostatically driven actuator is displaced by supplying a drive signal thereto. Meanwhile, a displacement sensing section senses its displacement and a calibrating section automatically calibrates the correlation between the drive signal and the displacement, thereby compensating for a variation in the characteristic of the actuator with time and according to the environment. A switching section selectively connects the single displacement sensing section to a plurality of moving elements one after another, thereby cutting down the circuit for displacement sensing.