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Standard specimen for a charged particle beam apparatus, specimen preparation method thereof, and charged particle beam apparatus
Standard specimen for a charged particle beam apparatus, specimen preparation method thereof, and charged particle beam apparatus
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机译:带电粒子束装置的标准试样,其试样制备方法和带电粒子束装置
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摘要
An object of the present invention is to provide a standard specimen for a charged particle beam enabling highly precise measurement of sub-micron to several 10 μm in size on an image and an apparatus using the standard specimen. In order to attain the above described object, the present invention provides a standard specimen for a charged particle beam including two different specimens for magnification or measurement calibration and a charged particle beam apparatus using the specimens.
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