INTEGRATED SYSTEM FOR MANUFACTURE OF SUB-MICRON 3D STRUCTURES USING 2-D PHOTON LITHOGRAPHY AND NANOIMPRINTING AND PROCESS THEREOF

摘要

ABSTRACT INTEGRATED SYSTEM FOR MANUFACTURE OF SUB-MICRON 3D STRUCTURESUSING 2-D PHOTON LITHOGRAPHYAND NANOIMPRINTING AND PROCESS THEREOFA system integrating 2-photon lithography and nanoimprinting to manufacture high-throughput and low cost sub-micron 3D structure products is proposed. A process integrating 2-photon lithography and nanoimprinting to manufacture high-throughput and low cost sub-micron 3D structure products is also proposed. The invention enables the sub-micron 3D structures to be created layer by layer. Applications include manufacture of scaffolds for tissue engineering and medical devices such as bridges for nerves and bones.Fig. 1