METHOD OF CHARACTERIZING DIELECTRIC FILMS BY ULTRAVIOLET PHOTOEMISSION SPECTROSCOPY

摘要

Method of characterizing a thick dielectric film (3) by ultraviolet photoemission spectroscopy. A DC voltage (V) is applied during the measurement of a photoemission threshold (Es) corresponding to a maximum binding energy of electrons emitted by the film. The measurement is repeated by varying the DC voltage so as to establish fields of less than 107 V/cm through the film (3). The photoemission threshold is measured for each value of the applied voltage, and the photoemission threshold at zero voltage is calculated by regression on a straight line passing through the photoemission thresholds measured as a function of the square root of the voltage.