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AGENT FOR DETOXIFYING DISCHARGE GAS CONTAINING VOLATILE INORGANIC HYDRIDE AND METHOD OF DETOXIFYING DISCHARGE GAS CONTAINING VOLATILE INORGANIC HYDRIDE
AGENT FOR DETOXIFYING DISCHARGE GAS CONTAINING VOLATILE INORGANIC HYDRIDE AND METHOD OF DETOXIFYING DISCHARGE GAS CONTAINING VOLATILE INORGANIC HYDRIDE
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机译:含挥发性无机氢化物的气体脱毒剂及脱除方法含挥发性无机氢化物的气体脱毒剂及脱毒方法
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摘要
A detoxifying agent and a detoxifying method are provided which have a high detoxifying ability in a detoxifying treatment of a discharge gas containing a volatile inorganic hydride and generating in a semiconductor production step. A zeolite is added to a solid metal hydroxide, a solid metal carbonate, a solid basic metal carbonate, or a mixture of these compounds to thereby obtain the detoxifying agent which has the excellent ability to detoxify a discharge gas containing volatile inorganic hydride. The zeolite to be added is a synthetic zeolite selected from zeolite Y, MFI zeolite, mordenite zeolite, beta zeolite, zeolite A, zeolite X, and zeolite L or is a natural zeolite.
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