piezoelectric MEMS- based micro-speakers and a method of manufacturing the same

摘要

The present invention relates to a piezoelectric micro-speaker, and a manufacturing method using the MEMS, a piezoelectric element using a MEMS micro-speaker according to the present invention comprises a substrate; The elastic thin film formed on the substrate; A piezoelectric layer formed on the elastic film; Or upper phase of the piezoelectric layer, an electrode layer formed on the lower portion; And is formed in a lower portion of the elastic thin film is an exposed lower portion of the substrate comprises etching a resonance change to change the resonance frequency. ; As such, it is easy to manufacture, to reduce the abrupt change of the output sound pressure of the micro-speaker, increasing the volume of the output sound pressure, there is the advantage that can provide a micro-speaker that noise is minimized by the resonant frequency. ; MEMS, piezoelectric micro speaker, resonance