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FOCUSING RING WITH AN EXTENDED LIFETIME, A PLASMA PROCESS APPARATUS AND A PLASMA PROCESS METHOD
FOCUSING RING WITH AN EXTENDED LIFETIME, A PLASMA PROCESS APPARATUS AND A PLASMA PROCESS METHOD
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机译:延长使用寿命的聚焦环,等离子体过程装置和等离子体过程方法
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摘要
PURPOSE: A focus ring, a plasma process apparatus and a plasma process method are provided to improve operation efficiency and reduce a running cost by expending the lifetime of the focus ring.;CONSTITUTION: A process chamber(2) receives a substrate to be processed and performs a plasma process. A lower electrode is arranged in the process chamber. A high frequency power source(40) supplies a high frequency power to the lower electrode for generating a plasma. An upper electrode(21) is arranged to oppose the lower electrode. A focus ring(15) is placed on the lower electrode to surround the substrate.;COPYRIGHT KIPO 2010
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