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IMAGE SENSOR AND A METHOD FOR MANUFACTURING THE SAME, CAPABLE OF IMPROVING THE PROPERTY OF A THREE DIMENSIONAL IMAGE SENSOR WITHOUT CHEMICAL AND MECHANICAL POLISHING
IMAGE SENSOR AND A METHOD FOR MANUFACTURING THE SAME, CAPABLE OF IMPROVING THE PROPERTY OF A THREE DIMENSIONAL IMAGE SENSOR WITHOUT CHEMICAL AND MECHANICAL POLISHING
PURPOSE: An image sensor and a method for manufacturing the same are provided to perform a fine patterning process by forming a metal for a contact plug in a via-hole.;CONSTITUTION: A readout circuit is formed on a first substrate. A first interlayer insulation layer(160) is formed on the first substrate. A wiring(150) is formed on the first interlayer insulation layer to be electrically connected to the readout circuit. A second interlayer insulation layer(162) is formed on the wiring. The second interlayer insulation layer is partially etched using a photo resist pattern as an etching mask in order to form a via-hole which exposes the upper side of the wiring. A contact plug is formed in the via-hole.;COPYRIGHT KIPO 2010
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