CHEMICAL LIQUID SOLUTION SUPPLYING APPARATUS CAPABLE OF RAPIDLY DISCHARGING THE INCONGRUENT DRUG SOLUTION, AND A METHOD THEREOF

摘要

PURPOSE: A chemical liquid solution supplying apparatus and a method thereof are provided to reduce chemical liquid solution moving time from a dispense valve to a nozzle by arranging a drain valve in a branched chemical liquid solution tube.;CONSTITUTION: A chemical liquid solution supplying part(110) supplies chemical liquid solution. A chemical liquid solution supplying tube(120) forms the flow path of the liquid solution by being connected with the supplying part. A nozzle(140) discharges the liquid solution by being installed in the chemical liquid solution supplying tube. A dispense valve(130) controls the discharging of the liquid solution to the nozzle. A drain valve(150) is arranged in the chemical liquid solution supplying tube branched between the liquid solution supplying part and the dispenser valve. The drain valve drains the liquid solution.;COPYRIGHT KIPO 2010