SILICA GLASS CRUCIBLE FOR PULLING-UP SILICON SINGLE CRYSTAL, A METHOD FOR MANUFACTURING THE SAME AND A METHOD FOR MANUFACTURING THE SILICON SINGLE CRYSTAL, CAPABLE OF SUPPRESSING THE GENERATION OF A SILICON OXIDE GAS

摘要

PURPOSE: A quartz glass crucible for pulling up silicon single crystal, a method for manufacturing the same and a method for manufacturing the silicon single crystal are provided to prevent the generation of a cavity defect due to a void by reducing the generation of voids during a silicon single crystal manufacturing process.;CONSTITUTION: A quartz glass crucible(10) includes a linear body part(10A), a curved part(10C) and a bottom part(10B). A first natural quartz glass layer(11) composes the linear body part and the outer layer of the bottom part. A second natural quartz glass layer(13) is formed in the bottom part. A synthetic quartz glass layer(12) composes the inner layer of the quartz glass layer.;COPYRIGHT KIPO 2010