METHOD FOR MEASURING CAPACITANCE USING A TEST PATTERN, CAPABLE OF SIMULTANEOUSLY MEASURING PARALLEL CAPACITANCE AND FRINGING CAPACITANCE

摘要

PURPOSE: A method for measuring capacitance using a test pattern is provided to analyze a capacitance value of a parallel metal plate and a capacitance value of the edge of a metal plate.;CONSTITUTION: A method for measuring capacitance using a test pattern is as follows. An overall capacitance value is measured using a test pattern of two or more parallel metal plate structures. The area and circumference of upper metal plates(204,208,212) are measured. A parallel capacitance value is measured based on the measured area. A fringing capacitance value is measured based on the overall capacitance value and the parallel capacitance value.;COPYRIGHT KIPO 2010