PRISM FOR THE HOLOGRAPHIC EXPOSURE APPARATUS PREVENTING INTERFERENCE BETWEEN THE BEAM INCIDENT PART FOR THE EXPOSURE BEAM AND THE SPACE MEASUREMENT WHICH IS INCOME AND EXPOSURE APPARATUS INCLUDING THE SAME

摘要

PURPOSE: The prism for the holographic exposure apparatus and exposure apparatus including the same improves the space measurement structure between the holographic mask and material. It applies to the prism having the various shape.;CONSTITUTION: The holographic mask(50) is combined in the mask combining surface(11). The wire extend of the second incline(13) and the first inclined plane(12) prepares in order to accomplish approximately, figure 45 with the wire extend of the mask combining surface. The beam incident part for the space measurement at least prepares among the first inclined plane and the second incline in one. The beam incident part for the space measurement comprises the entrance face in which the beam for the space measurement for measuring interval between the material(60) is income.;COPYRIGHT KIPO 2010