MANUFACTURING METHOD OF A CHAOTIC MIXED MICRO CHANNEL, CAPABLE OF ADJUSTING THE GROOVE FORM OF THE LOWER END OF A CHANNEL ACCORDING TO A MASK FORM

摘要

PURPOSE: A manufacturing method of a chaotic mixed micro channel is provided to enable a channel to be easily copied several times by the manufacturing of a mask pattern through a photo sensitizer and to have a different form of groove pattern reusing a lower substrate.;CONSTITUTION: A manufacturing method of a chaotic mixed micro channel is as follows. A developing process using a channel forming photo sensitizer is performed to form a channel pattern with an inlet hole for drawing the fluid and a discharge hole for discharging the fluid(S103). A developing process using a groove forming photo sensitizer which has a property different from the channel forming photo sensitizer is performed, a groove pattern guiding chaotic mixing is formed on the channel pattern(S106). The heights of the channel pattern and the groove pattern are adjusted according the kinds of the channel forming photo sensitizer and the groove forming photo sensitizer.;COPYRIGHT KIPO 2011