Optical imaging device, particularly for microscopy, comprises two optical element groups that display object point of object plane on image plane, where one optical element group comprises optical element with reflective optical surface

摘要

The optical imaging device (102) comprises two optical element groups (108) that display an object point of an object plane (107) on an image plane (109). One optical element group comprises an optical element (111) with a reflective optical surface, where another optical element is provided with another reflective optical surface. Multiple reflections of an imaging beam occur on the optical surfaces during the imaging of the object point. Independent claims are included for the following: (1) a microscope, particularly for inspecting a substrate; and (2) an imaging method, particularly for microscopy.