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Measurement arrangement i.e. pH-sensor, for measuring ion concentration of measuring medium, has vibration exciter arranged in housing and mechanically coupled with chip for oscillating chip, where vibration exciter comprises transducer
Measurement arrangement i.e. pH-sensor, for measuring ion concentration of measuring medium, has vibration exciter arranged in housing and mechanically coupled with chip for oscillating chip, where vibration exciter comprises transducer
The arrangement (1) has an ion-sensitive FET-semiconductor chip comprising an ion-sensitive surface section with a gate-region. A housing (4) for accommodating the chip has an opening, where the section is subjected with measuring medium through the opening. A seal runs around the section and the opening for sealing the section against an inner area of the housing. A vibration exciter i.e. piezoelectric-exciter, is arranged in the housing and mechanically coupled with the chip for oscillating the chip, where the vibration exciter comprises an ultrasonic transducer.
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