Method for manufacturing regular nano-structures on solid body surface for computers, involves bringing relief structure on solid body surface before execution of illumination, where structure exhibits dimensions within submicrometer range

摘要

The method involves illuminating a surface of a solid body (30) with accelerated ions, and removing material from the surface of the solid body, where the solid body is made from semiconductor compound material. Illumination is executed such that a self organization process occurs on the surface of the solid body. A relief structure (34) is brought on the solid body surface, before execution of the illumination, where the relief structure exhibits dimensions within a submicrometer range. The relief structure is made of material inhomogeneous to material of the solid body.