A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode 110 having a conically shaped portion, a second electrode 114 having a conically shaped portion, and a first insulator 120 having a conically shaped portion, wherein the first insulator comprises two extending portions 122, 124 towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.
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