ANALYSIS METHOD FOR METAL IMPURITY DIFFUSION VELOCITY CALCULATION IN QUARTZ GLASS, AND SORTING METHOD OF QUARTZ GLASS USING THE ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a calculation method of the diffusion coefficient of a metal impurity by measuring metal impurity concentration distribution along a few cm in the depth direction in quartz glass, regarding the diffusion of the metal impurity having an extremely fast diffusion rate in quartz glass in such a way that the diffusion distance reaches a few cm in a short diffusion time, for which heretofore the analysis has been difficult.;SOLUTION: After diffusing the metal impurity only from one surface of quartz glass, samples are cut out in parallel to the surface from which the metal impurity is diffused, and an accurate position from the surface of the quartz glass of the sample is measured. The diffusion rate of the metal impurity is calculated by measuring the metal impurity concentration in the sample.;COPYRIGHT: (C)2011,JPO&INPIT